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Clean Room: Micro and Nano Fabrication Facility

Clean Room: Micro and Nano Fabrication Facility

Major cleanroom facilities.

BITS Pilani Hyderabad campus established state of the art facilities for Micro and Nano semiconductor device fabrication and characterization. The size of clean room is 581 sq. f and 80% of it is maintained as (ISO 6) class 1000 and the rest is class 100 (ISO 5). Complete class 100 area covered with yellow light and dedicated for Lithography process.